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Scanning electron microscopes GeminiSEM

Артикул: GeminiSEM

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FE-SEM For Highest Demands in Sub-nanometer Imaging, Analytics and Sample Flexibility

ZEISS GeminiSEM stands for effortless imaging with sub-nanometer resolution. These FE-SEMs (field emission scanning electron microscope) combine excellence in imaging and analytics. Innovations in electron optics and a new chamber design let you benefit from better image quality, usability and flexibility. Take sub-nanometer images below 1 kV without an immersion lens. Discover three unique designs of the ZEISS Gemini electron optics.

Ideal for core facilities - ZEISS GeminiSEM 360
Enabling efficient analysis - ZEISS GeminiSEM 460
New standard for surface imaging – ZEISS GeminiSEM 560

GeminiSEM 360

GeminiSEM 360 is the ideal instrument for your core facility, delivering maximum versatility for materials & life science, and industry. With its Gemini 1 electron optical column it delivers high resolution imaging and analytics over the widest range of applications and sample types.

Benefit from surface sensitive imaging and gather information at low voltage or at high probe current. Discover the advantages of Inlens detection, NanoVP, contextual image viewing or AI-powered segmentation.

Your tool for sample flexibility
Unrivalled user experience
Exceptional capability extension

GeminiSEM 460

GeminiSEM 460 is made for your most exacting analytical tasks and enables efficient analysis and unattended workflows. Its Gemini 2 column serves the most challenging tasks in analytical microscopy. Switch seamlessly between imaging and analytical conditions.

Switch seamlessly from low current-low kV work to high current-high kV work. Extend your possibilities with an in situ heating and tensile lab. Take advantage of a coplanar EDS/EBSD configuration, shadow-free mappings of EDS data and rapidly collecting EBSD maps with 4000 patterns/s.

Utilize high resolution and high current
Customized, automated workflows
Your pathway to even more possibilities
See highlights

GeminiSEM 560

GeminiSEM 560 raises the bar for surface-sensitive, distortion-free, high resolution imaging and lets you image below 1 kV easily. Introducing Gemini 3, and its new electron optical engine Smart Autopilot it delivers the highest resolution in the family at all working conditions.

Explore the new standard for surface imaging: magnetic field-free imaging with sub 1 nm resolution below 1kV without sample biasing or monochromation, Gemini 3 with its new electron optical engine Smart Autopilot, finding the sweet spot in your working conditions – and much more.

The new standard in surface imaging
Expert knowledge integrated
Experience unique contrast

The Technology Behind Gemini Electron Optics

Gemini 1

What You Always Wanted to Know About the Fundamentals

Field emission SEMs are designed for high resolution imaging. Key to the performance of a field emission SEM is its electron optical column. Gemini is tailored for excellent resolution on any sample, especially at low accelerating voltages, for complete and efficient detection, and ease-of-use.

Gemini optics are characterized by three main components:

The Gemini objective lens design combines electrostatic and magnetic fields to maximize optical performance while reducing field influences at the sample to a minimum. This enables excellent imaging, even on challenging samples such as magnetic materials.
Gemini beam booster technology, an integrated beam deceleration, guarantees small probe sizes and high signal-to-noise ratios.
The Gemini Inlens detection concept ensures efficient signal detection by detecting secondary (SE) and backscattered (BSE) electrons in parallel minimizing time-to-image.

For your applications benefit from:

Long-term stability of the SEM alignment and the effortless way it adjusts all system parameters such as probe current and acceleration voltage.
Achieve distortion-free, high resolution imaging with the help of the near magnetic-field free optics.
Get information solely from the top-most layer of your samples with the Inlens SE detector that produces images out of the truly surface sensitive SE 1 electrons.
Obtain true material contrast at very low voltages with the detection concept of the Inlens EsB detector.

Gemini 2

Capitalize on Fast Analytics

A comprehensive characterization of any sample calls for performance in imaging and in analytics. Plus, today’s users expect the set up and handling of the instrument to be easy. The Gemini 2 optics answers these demands

Switch seamlessly between high resolution imaging and analytics

GeminiSEM 460 comes with Gemini 2 optics featuring a double condenser.
Adjust the beam current continuously while the spot size stays optimized simultaneously.
Switch seamlessly between high resolution imaging – at low beam currents – and analytical modes – at high beam currents.
You save time and effort because there’s no need to realign the beam after changing imaging parameters.

Stay flexible and work efficiently

Stay flexible: use the highest beam current density for high resolution imaging and analysis at both low and high beam current, independently of which beam energy you select.
Your specimen won’t be exposed to a magnetic field: achieve distortion-free EBSD patterns and high resolution imaging over a large field of view.
Tilt the specimen without influencing the electron optical performance. Image even magnetic samples easily.
Choose a charge reduction mode that suits your sample best: local charge compensation, variable pressure in the chamber or NanoVP.

Gemini 3

Imaging below 1 kV - Expert Knowledge Integrated

The Gemini 3 optics are optimized for resolutions at low and very low voltages, and for contrast enhancement. They ensure maximum resolution at all working conditions from 1 kV to 30 kV and consists of two components which work synergistically: the Nano-twin lens and Smart Autopilot, a new electron optical engine. Additional technological characteristics are the high gun resolution mode and the optional Tandem decel.

Resolution Modes – Enabling You to See More Details

More details and more detection signal for your SEM images, enabled by two modes. In high resolution gun mode, the reduced energy spread of the primary beam minimizes the effect of chromatic aberration to allow even smaller probe sizes. In Tandem decel mode, a deceleration voltage is applied to the sample. Use this to further improve resolution below 1 kV and boost the detection efficiency of backscattered diode detectors.

The Nano-twin lens delivers:

Sub-nanometer resolution at low and ultra-low voltages with excellent signal detection efficiency.
Three times lower lens aberrations at low kV compared to the standard Gemini objective lens - resulting in a three times lower magnetic field on the sample, of the order of 1 mT.
Optimized geometry and the electrostatic and magnetic field distributions.
An enhanced Inlens detector signal under low voltage imaging conditions.
These characteristics provide the ability for sub-nanometer imaging below 1 kV without immersing the sample in an electro-magnetic field.

How it works:

Smart Autopilot optimizes electron trajectories through the column thus ensuring the highest possible resolution at each acceleration voltage.
The autofunctions enable a seamless alignment free transition across the entire magnification range from 1× to 2,000,000× and a 10× increase in the field of view allowing a 13 cm object to be imaged in a single frame.
The image framestore of 32k × 24k in combination with the new overview mode ensure a stitching free pixel density over an unparalleled field of view

Applications in Materials Science

Typical Tasks and Applications

Image and analyze any real-world sample effortlessly, over large areas or at sub-nanometer resolution.
Explore examples from nanoscience, engineering and energy materials, or bio-inspired materials, polymers & catalysts.
See how GeminiSEM helps you to characterize your specimen comprehensively.

Caption: Structured gold platelets, research on plasmonic effects, GeminiSEM 560, BSD.

Microscopy Solutions for Industry

Typical Tasks and Applications

Failure analysis on mechanical, optical or electronic components
Fracture analysis and metallography
Surface, microstructure and device characterization
Compositional and phase distribution
Impurity and inclusion determination

Caption: Cross-section of lithium ion battery

Applications in Electronics & Semiconductor